In today's high-tech manufacturing industry, especially in critical processes such as CVD/PVD, Etch, and IMP in the semiconductor industry, precise temperature control is key to ensuring product quality and process stability. Chiller high-precision cold and hot cycle is a device that achieves precise temperature control through refrigerant circulation, widely used in fields such as semiconductor manufacturing, laser, medical, and precision laboratories.
Chiller ZC209 is a device that controls the temperature of circulating fluid and outputs cold and hot fluids. It has rich functions such as high temperature stability, wide temperature range, fault self diagnosis, and external communication. Adopting advanced refrigeration and temperature control technology, it has a wide temperature range: -20 ℃ to+90 "℃, and is widely used in industries such as semiconductor manufacturing processes, laser processing machines, analysis devices, LCD manufacturing devices, and metal mold temperature control,
The working principle of Chiller ZC209:
Compressor: compresses low-temperature and low-pressure refrigerant gas into high-temperature and high-pressure gas, enhancing internal energy.
Condenser: High temperature and high pressure gases exchange heat with cooling media (such as water or air) through a condenser, releasing heat and condensing into high-pressure liquids.
Expansion valve: High pressure liquid is throttled and depressurized to become a low-temperature and low-pressure gas-liquid mixture.
Evaporator: The low-temperature and low-pressure mixture absorbs heat from the cooling medium, causing its temperature to decrease, while the refrigerant evaporates into gas and re enters the compressor cycle.
Core advantages of Chiller ZC209
High precision temperature control:
·Temperature stability of ± 0.5 ℃, meeting the requirements of harsh scenarios such as semiconductor manufacturing.
·By adopting PID control technology, feedforward control algorithm, and multi-sensor fusion (such as platinum resistance and infrared thermal imager), rapid and stable temperature tracking is achieved.
Wide temperature range:
·Support wide range temperature control from -20 ℃ to+90 ℃, covering diverse needs.
High stability and reliability:
·Multiple protections: Multiple human-machine protections for overheating, overpressure, dry burning, leakage, and misoperation.
·Stable and reliable operation: All components are made of well-known devices, and the self-developed control system is efficient and stable
Intelligence and ease of use:
Touch screen operation: friendly human-computer interaction interface, supports remote communication operation, historical data storage and export
Application scenarios of Chiller ZC209
1. Semiconductor manufacturing:
·Lithography and etching process: Ensure that the temperature fluctuation of photoresist coating is ± 0.5 ℃, and avoid line width deviation.
·EUV light source cooling: Maintain a constant temperature of the lithography machine mirror to avoid mirror deformation.
·Temperature control of wire bonding machine: stabilizes the temperature of the bonding head, improves welding strength and yield.
2. Laser and medical equipment:
·Provide stable cooling for the laser to ensure beam quality; Maintain a constant temperature environment in medical equipment to ensure treatment safety.
3. Precision laboratory:
·Simulate extreme temperature conditions and study changes in material properties; Provide a stable temperature environment for high-precision measuring equipment (such as SEM, AFM) to improve measurement accuracy.
4. Industrial production:
In fields such as pharmaceuticals and chemical engineering, controlling solution temperature to prevent solute denaturation, accelerating solvent evaporation, and shortening production cycles.