Chiller is a key temperature control system in integrated circuit manufacturing, mainly used in photolithography, dry etching, chemical vapor deposition (CVD), chemical mechanical polishing (CMP), and rapid heat treatment (RTP) processes to accurately control the temperature of silicon wafer trays and reaction chambers, providing reliable guarantees for the stability and consistency of advanced processes.

The role of Chile in semiconductor processes
1. Lithography machine
Chiller is mainly used to cool the light source system and projection objective lens, ensuring stable temperature of the objective lens and enabling high-precision projection of lithography patterns onto silicon wafers, ensuring exposure accuracy and resolution.
2. Etching machine
In the etching process, the chiller is responsible for cooling key components such as the reaction chamber and RF power supply. The temperature of the reaction chamber directly affects the etching rate and uniformity, and precise temperature control can ensure the stability and consistency of the etching process.
3. Chemical Vapor Deposition (CVD)
During the CVD process, the reaction gas releases a large amount of heat at high temperatures, and temperature fluctuations may lead to uneven film thickness or compositional deviations. Chiller maintains a stable deposition environment and ensures film quality by cooling the reaction chamber and gas delivery pipelines.
4. Ion implantation machine
Chiller cools the ion source and accelerator electrodes to ensure stable intensity and energy of the ion beam. Temperature fluctuations may affect the depth and uniformity of ion implantation, therefore precise temperature control is crucial for process results.
5. Semiconductor electrical measurement equipment
In parameter analyzers and other measuring devices, temperature changes can affect the electrical characteristics of electronic components. Chiller provides a stable temperature control environment to ensure the accuracy and reliability of measurement data, reducing testing errors.
The working mechanism of Chiller
The core working mechanism of Chiller: Based on the principles of refrigeration cycle and heat exchange, heat transfer is achieved through the phase change process of refrigerant in a closed system.
Its workflow can be divided into four key stages:
Evaporative heat absorption: Low pressure liquid refrigerant absorbs heat from the cooled object in the evaporator and vaporizes into low-temperature low-pressure steam.
Compression and pressurization: The compressor sucks in low-temperature steam and compresses it, turning it into high-temperature and high-pressure gas.
Condensation heat release: High temperature and high pressure refrigerant enters the condenser and releases heat to the cooling medium (water or air), condensing into high-pressure liquid.
Throttle and pressure reduction: After the high-pressure liquid refrigerant is reduced in pressure by the throttle valve, it becomes a low-temperature and low-pressure liquid again, and returns to the evaporator to complete the cycle.
Through a closed-loop cycle of evaporation, compression, condensation, and throttling, the chiller continuously transfers the heat generated by the equipment to the external environment, achieving precise temperature control.
The semiconductor device high and low temperature testing equipment chiller produced by ZONGLEN has a temperature control accuracy of ± 0.1 ℃. It adopts various advanced control technologies to improve the stability, control accuracy, and response speed of the equipment, and is applied in various semiconductor related fields such as etching equipment and CMP.
Characteristics of ZONGLEN's chiller:
·Wide temperature range: -20 ° C~+90 ° C
·High temperature accuracy: up to ± 0.5 ℃ under static load
·Touch screen operation: friendly human-computer interaction interface, supports remote communication operation, historical data storage and export
·Multiple protections: multiple human-machine protections for overheating, overpressure, dry burning, leakage, and misoperation
·Stable and reliable operation: All components are made of well-known devices, and the self-developed control system is efficient and stable

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