The semiconductor specific temperature control unit Chiller is an indispensable key equipment in integrated circuit manufacturing. It achieves high-precision control of the temperature, flow rate, and pressure of the circulating liquid to meet the temperature control requirements of the semiconductor process.
The semiconductor specific temperature control equipment (Chiller) mainly controls the temperature of the reaction chamber in the process. The working principle is to use the refrigeration cycle and the heat exchange principle of the process cooling water to achieve high-precision control of the temperature, flow rate, and pressure of the circulating liquid used in the semiconductor process equipment. In semiconductor manufacturing processes, semiconductor specific temperature control equipment is mainly used in etching processes.
The semiconductor specific temperature control unit Chiller plays a key role in the entire semiconductor manufacturing process and has a wide range of application scenarios
1. Wafer manufacturing: During the wafer manufacturing process, accurate temperature control of the manufacturing environment is required to ensure stable quality of the chips produced. Chiller can provide a stable low-temperature or constant temperature environment to meet the high-precision requirements of wafer manufacturing. For example, in the photolithography process, Chiller maintains stable light source temperature by circulating cooling liquid, ensuring constant wavelength and intensity; Accurately cool the projection objective lens, control the deformation within 0.1nm, and reduce aberrations.
2. Chip packaging testing: Accurate temperature control is also required during the chip packaging and testing stages. Chiller can simulate temperature environments under various working conditions, helping testers verify the performance and reliability of chips. For example, in the etching process, the chiller is responsible for cooling key components such as the reaction chamber and RF power supply to ensure the stability and consistency of the etching process.
3. Electronic component testing: In the reliability testing and performance verification of electronic components, it is often necessary to conduct testing under harsh temperature conditions to evaluate the performance and lifespan of the components. Chiller can provide a wide temperature range from low to high temperatures to meet the needs of these tests.
4. Laboratory research: In the field of materials science, researchers often need to study the physical and chemical properties of materials at different temperatures. Chiller can provide a stable temperature environment to support the progress of these research works. In the biomedical field, some experiments and tests also need to be conducted under specific temperature conditions, and Chiller can accurately control the temperature, providing necessary experimental conditions for biomedical research.
5. Industrial production: In the field of precision machining, such as the production process of precision machinery, optical components and other products, strict temperature control of the processing environment is required. Chiller can provide a stable temperature environment to ensure machining accuracy and product quality. In some industrial production processes, such as heat treatment, welding, etc., it is also necessary to heat or cool the workpiece. Chiller can meet the temperature control requirements of these processes through its heating and cooling functions.
The SEMI Chiller temperature controller developed for mid cold low-temperature production is mainly used for precise temperature control of process equipment in semiconductor (FAB) and FPD display processes, such as temperature control of etching/film/glue/development process equipment (such as LAM, AMAT, TEL, NAURA, Naura, Aixtron, Veeco, AMEC, etc.).
The SEMI Chiller thermostat is a temperature control device in the process mainly composed of a liquid pump, a heat exchanger, a liquid storage tank, a refrigeration compressor, and a control system.
Characteristics of SEMI Chiller Temperature Controller:
Advanced control technology, including fuzzy control and feedforward control, ensures that the equipment has high temperature control accuracy and good temperature tracking performance
Advanced energy-saving technologies, Hot-Gas， Frequency conversion technology has significantly reduced equipment energy consumption
Advanced sealing and leak detection technology greatly reduces the leakage and evaporation of circulating liquid
Ultra low temperature refrigeration technology, single/multi-stage cascade technology, multi-layer composite insulation technology
Support users' multi-channel/multi type customization needs

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