Sorting machine and probe station are specialized devices that connect the pins of chips with the functional modules of the testing machine and achieve batch automated testing. In the design verification and finished product testing stages, the testing machine needs to be used in conjunction with the sorting machine; In the wafer inspection process, the testing machine needs to be used in conjunction with the probe station.
The characteristics of the sorting machine:
Due to the miniaturization and integration characteristics of integrated circuits, sorting machines have high requirements for automated high-speed repetitive positioning control capability and pressure measurement accuracy, with error accuracy generally required at the 0.01mm level.
The batch automation operation of the sorting machine requires strong operational stability, such as high requirements for UPH (number of integrated circuits transported per hour) and Jam Rate (failure shutdown rate).
3. The diversity of integrated circuit packaging forms requires sorting machines to have the ability to quickly switch between different packaging forms of integrated circuits during testing, thereby forming strong flexible production capabilities and adaptability.
4. Integrated circuit testing has certain requirements for external testing environments, such as some integrated circuit testing requiring multiple temperature testing environments ranging from -55 ° C to 150 ° C, no magnetic field interference testing environments, and multiple external field stacking testing environments. How to provide the corresponding testing environment is a technical difficulty for the sorting machine.
Gas refrigeration machine is a closed-loop refrigeration system designed to cool dry gases (such as nitrogen, argon or air) from ambient temperature to low temperature without pre cooling, and the gas is non circulating. Gas refrigeration machines use refrigeration cascade technology to achieve low-temperature and ultra-low temperature gas cooling processes, without the need for consumable coolants such as liquid nitrogen and dry ice, reducing costs and risks; It is a highly cost-effective system for gas refrigeration applications. A wide temperature range can provide a stable temperature environment for sorting machines, which are applied in experiments such as cooling semiconductor processing components and low-temperature characterization of materials.
Characteristics of probe station:
1. The precision requirements for the probe station are very strict, with a repeat positioning accuracy requirement of 0.001mm (micrometers) level.
2. Wafer inspection requires extremely high equipment stability, and each executing device needs to be controlled for redundancy. The wafer damage rate must be controlled within 1ppm (one millionth).
3. Wafer inspection requires multiple sets of visual precision measurement and positioning systems, as well as the ability to visually calibrate and fit multiple coordinate systems together.
4. The probe station has extremely high requirements for the cleanliness of the equipment working environment. In addition to achieving fully automated operations with almost no human intervention, it also requires low dust in the transmission mechanism and special functions such as airflow dust removal.
A chiller is a device that controls the temperature of circulating liquid and outputs cold and hot liquid. It has rich functions such as high temperature stability, wide temperature range, fault self diagnosis, and external communication. It has a wide temperature range: -20 ℃ to+90 ℃, providing a stable temperature environment for the probe station during testing. It is widely used in industries such as semiconductor manufacturing, laser processing machines, analysis devices, LCD manufacturing devices, and metal mold temperature control.