A semiconductor equipment chiller, also known as a semiconductor cooler, is a device used in the semiconductor manufacturing process to cool equipment or processes. Its working principle is to use the refrigeration cycle and heat exchange principle to control the temperature, flow rate, and pressure of the circulating liquid to remove the heat generated by the semiconductor process equipment, thereby achieving precise temperature control and ensuring the stability and product quality of the semiconductor manufacturing process.
There are two main types of semiconductor equipment chillers, and their principles and structures are as follows:
Thermoelectric refrigeration chiller
Principle: Based on the thermoelectric effect, when an electric current passes through a thermocouple composed of two different semiconductor materials, electrons move from one end to the other, absorbing heat at one end and releasing heat at the other end, thereby achieving refrigeration. By changing the direction of the current, the cooling and heating functions can also be switched
Structure: It mainly consists of a heat sink, p-type semiconductor material, n-type semiconductor material, hot end and cold end electrodes, DC power supply, and control circuit. Among them, the radiator is used for heat dissipation; The staggered arrangement of p-type and n-type semiconductor materials forms a p-n junction, generating a cooling effect; The hot end and cold end electrodes are used for electrical energy input and output, as well as for conducting cooling effects; DC power supply provides electrical energy; Monitor and regulate the working status of the control circuit
Compressor cooled chiller
Principle: The compressor sucks in low-pressure working fluid vapor from the evaporator, compresses it into high-temperature and high-pressure gas, and sends it to the condenser. It is cooled into high-pressure liquid in the condenser, throttled into low-pressure liquid through a throttle valve, and then sent to the evaporator. It absorbs heat and evaporates into low-pressure vapor in the evaporator, completing the refrigeration cycle. By controlling the flow and state changes of refrigerant, heat transfer and temperature control can be achieved
Structure: It mainly consists of four major components: evaporator, condenser, compressor, and throttle valve. Evaporator is a device that transports cold and absorbs heat from the cooled object; The compressor is responsible for inhaling, compressing, and transporting refrigerant vapor; The condenser releases heat, transferring the heat absorbed by the evaporator and the heat converted by the compressor to the cooling medium for removal; The throttle valve throttles and reduces the pressure of the refrigerant, controls the amount of refrigerant liquid flowing into the evaporator, and divides the high-pressure and low-pressure sides of the system
In addition, the semiconductor equipment chiller will also have a circulation pump to drive the cooling liquid or refrigerant to circulate in the system, ensuring effective heat transfer and exchange; And the control system, based on the feedback signal of the temperature sensor, accurately controls the operating status and cooling output of the refrigeration system to maintain the set temperature stability
The Chiller ZC209 independently developed by ZONGLEN is a device that controls the temperature of circulating fluid and outputs cold and hot fluids. It has rich functions such as high temperature stability, wide temperature range, fault self diagnosis, and external communication. Adopting advanced refrigeration and temperature control technology, it has a wide temperature range: -20 ℃ to+90 ℃, and is widely used in industries such as semiconductor manufacturing processes, laser processing machines, analysis devices, LCD manufacturing devices, and metal mold temperature control.
Chiller ZC209 is mainly used in semiconductors, lasers FPD， For example, semiconductor (etching equipment, CMP, coating machine, developing machine, testing machine, cleaning machine) laser (laser processing machine, laser welding machine, laser, fiber laser transmission cable joint, ultrasonic inspection device, secondary battery manufacturing engineering) can be applied to a wide range of industries, such as pharmaceuticals, chemicals, new energy, semiconductors, laboratories, universities and other fields.