1. What is parameter testing
The usual parameter testing involves electrical parameter testing, mainly characterizing the parameter characteristics of resistors, diodes, transistors, and capacitors. Actual chips may involve very complex logical relationships and structures, composed of various basic devices. The transistor density of 3nm chips has reached billions of meters per square meter, which is the core driving force for the continuous iteration of electronic product performance.
The vast majority of parameter testing includes current voltage (IV) measurement or capacitance voltage (CV) measurement. Generally, SMU source/measurement unit is used for IV measurement, while CMU capacitance testing unit is used for CV testing.
2.When/where to conduct parameter testing
The purpose of parameter testing is to determine the characteristics of semiconductor processes. In general, parameter testing includes the following three main areas: process development, device modeling, and process control.

The first two items are conducted in a laboratory, research and development, or trial production environment, while the last item needs to be conducted in a manufacturing environment. The parameter measurement equipment used in different environments obviously has different requirements. Desktop instruments can be used for process development and device modeling, while high throughput testers should be used for production processes. It must be understood that parameter testing is almost never conducted on the final product. On the contrary, it is conducted on a specific testing structure that can provide information about the process itself. Parameter testing is always performed directly on semiconductor wafers. In production testing, the parameter testing structure is sometimes located in the engraved lines or "streets" of the wafer, in order to minimize the wafer area occupied by the device. Usually, it is only for parameter testing of the structure, rather than for process development and reliability testing of the entire wafer.
In production, parameter testing is usually performed after the wafer manufacturing process is completed (i.e. passivation has been carried out) and before the electrical performance sorting (electrical sorting) of the product bare chips.
We need to test every wafer in each batch and save the data to the database. Obviously, this is a massive amount of data that can be processed into various formats using various software tools. A popular format is wafer chart, which uses different colors to represent different ranges of data values on a wafer drawn with a scalar.
3.The first type of instrument that can perform such parameter measurements is the analog graphical instrument. The semiconductor parameter tester can perform current voltage (IV) and capacitance measurements (CV, C-f, C-t measurements), including small current measurements with resolutions as low as fA (milliampere) and CV measurements up to 1MHz, and quickly and easily analyze the measurement results to complete semiconductor parameter testing. Semiconductor parameter testing is a fundamental measurement for determining the characteristics of semiconductor devices and their manufacturing processes.

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